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发明名称
PROCESS FOR THE DEPOSITION OF MICROSTRUCTURES HAVING A GIVEN STRUCTURE USING LASER LIGHT
摘要
申请公布号
EP0306954(A3)
申请公布日期
1990.08.16
申请号
EP19880114696
申请日期
1988.09.08
申请人
BAEUERLE DIETER
发明人
BAEUERLE DIETER
分类号
C23C16/02;C23C16/04;C23C16/48;C23C16/56;H05K3/10;H05K3/14;H05K3/38;(IPC1-7):C23C16/02
主分类号
C23C16/02
代理机构
代理人
主权项
地址
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