发明名称 Alloy target for magneto-optical recording
摘要 An alloy target for magneto-optical recording having component and composition comprising 10 to 50 atom % of at least one rare earth element from Sm, Nd, Gd, Tb, Dy, Ho, Tm and Er, the balance being substantially at least one transition metal from Co, Fe and Ni, and having a mixed structure comprising a phase of intermetallic compound of the rare earth element and the transition metal and a fine mixed phase of the rare earth element and intermetallic compound of the rare earth element and the transition metal or having a mixed structure comprising the structure above and a phase of the rare earth element alone. The target has uniform composition and high strength free from cracking, etc., shows less composition difference between film and target and less change of the film composition with elapse of sputtering time.
申请公布号 US4946501(A) 申请公布日期 1990.08.07
申请号 US19890421958 申请日期 1989.10.16
申请人 SUMITOMO METAL MINING COMPANY LIMITED 发明人 NATE, TASUO;MORIMOTO, TOSHIO;OKA, KOUICHI;ENDO, SHINOBU
分类号 B41M5/26;C23C14/34;G11B11/105;H01F41/18 主分类号 B41M5/26
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