发明名称 |
Method of passivating crystalline substrates |
摘要 |
A method of bulk passivating a crystalline or polycrystalline substrate made from silicon, germanium, gallium arsenide or other III-V compounds, and II-VI compounds by exposing the substrate to a fluorine ion beam created by a Kaufman ion source. The Kaufman ion source is controlled so that the intensity of and duration of exposure to the fluorine ion beam is sufficient to bulk passivate the substrate. Preferably, the substrate is preheated to a selected temperature prior to the ion beam exposure.
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申请公布号 |
US4945065(A) |
申请公布日期 |
1990.07.31 |
申请号 |
US19880201559 |
申请日期 |
1988.06.02 |
申请人 |
MOBIL SOLAR ENERGY CORPORATION |
发明人 |
GREGORY, JAMES A.;HANOKA, JACK I.;VAYMAN, ZINOVY Y. |
分类号 |
H01L21/324;H01L21/477 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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