CO GAS SENSOR

摘要

The SnO2-Ag thin film element in which the Ag is contained at 0.2-5 % is formed by the vacuum-deposition method. The element is heat- treated at 200-800 degree C for 5-120 min.. The electrode layer Au is vacuum-deposited on the heat-treated element. The electrode layer is etched with l mm gap after the photo-resistor. Then the lead wire is soldered on the electrode and unnecessary Ag layer is etched by the photo lithography.