| 摘要 |
<p>A nitrogen-containing Fe-based soft magnetic alloy suitable for use as the material of a magnetic head core, as well as a method for manufacturing the soft magnetic ally film. Unlike a mere nitride alloy film, the soft magnetic alloy of the present invention has a compositionally modulated structure in which at least the nitrogen content is periodically modulated in the direction of thickness of the film so as to have a nitride layer rich at least in nitrogen and a non-nitride layer poor at least in nitrogen. The soft magnetic alloy film of the invention comprises a main constituent of Fe, at least one metalloid element selected from the group consisting of B, Si and C, and at least one metal element selected from the group consisting of Nb, Ta, Zr and Ti and has fine Fe-based grains included therein. By virtue of these film structure and film composition, the soft magnetic alloy film of the invention exhibits superior magnetic characteristics such as low coercive force, high saturation magnetization and low magnetostriction, as well as superior resistance both to corrosion and wear. The method of the invention is for forming the soft magnetic alloy of the invention, and has the steps of forming by sputtering a compositionally modulated nitride ally film, and then effecting on the compositionally modulated nitride alloy film a high-temperature heat treatment so as to cause a change in a film structure to form the soft magnetic alloy film.</p> |
