| 摘要 |
PURPOSE:To improve the reliability of polishing position detection by forming a resistance detecting electrode for detecting a short circuit of a circuit of >=2 kinds of different metallic materials. CONSTITUTION:The short-circuit detection part 71 of a resistance detecting electrode is formed of Al to a 0.5mum film thickness, and the open detection part 72 is formed of permalloy to a 0.1mum film thickness. The resistance detecting electrode is arranged as a substitute for a resistance detecting electrode 23 used on both sides of the conductor coil 22 of a thin-film magnetic head. The short detection part 71 is formed of soft Al, so a short-circuit due to a burr and a shear drop during polishing is never generated; and the open detection part 72 is formed of hard ''Permalloy '' and is thin, so neither burrs nor shear drops are generted, so that an open circuit and a short circuit at a polishing stop position X are detected by resistance detectors 27 and 27', respectively. |
