| 摘要 |
<p>PURPOSE:To increase the structural strength of a flow rate detector as a whole by forming a flow rate detection circuit part to a substrate and further forming a thick film dielectric part and a membrane flow rate detection part to the substrate to connect the flow rate detection part and the flow rate detection circuit part through a conductor. CONSTITUTION:A hybrid substrate 1 is composed of alumina, and a dielectric thin film 2 and a flow rate detection part R are formed to said substrate 1. Further, a thick film conductor 3 constituting the connection part of a flow rate detection circuit is formed on said substrate 1 and the flow rate detection part R is connected to said thick film 2 by wire bonding 4. By this constitution, the smooth surface of the dielectric thick film 2 can be utilized and the membrane flow rate detection part R becomes easy to form and, since the dielectric thick film 2 is interposed between the flow rate detection part R and the substrate 1, the radiation of the heat of the flow rate detection part R into the substrate 1 is suppressed and, further, by a hybrid IC substrate, the strength of this flow rate detector is increased as a whole.</p> |
