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发明名称
PROCESS TUBE
摘要
申请公布号
JPH02116645(A)
申请公布日期
1990.05.01
申请号
JP19880268050
申请日期
1988.10.26
申请人
HITACHI LTD;HITACHI HOKKAI SEMICONDUCTOR LTD
发明人
KATOU YUKIO
分类号
C03C17/02;C03C17/23;C03C17/34;C30B31/10;H01L21/205;H01L21/22;H01L21/31
主分类号
C03C17/02
代理机构
代理人
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地址
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