发明名称 WIRE BONDING APPARATUS
摘要 PURPOSE:To prevent the oxidization of a ball and achieve a uniform shape by making a bonding horn have an inert gas eject function. CONSTITUTION:A hollow section is made in a bonding horn 1 that fixes a capillary 2. A hole smaller than the hollow section is made and it is made to have an inert has eject function via the hole. Inert gas is ejected from above a bonding wire 3 over the entire circumference of the bonding wire 3 and a bonding horn is made to have an eject function. That is, since inert gas is ejected from above the end of the bonding wire 3 and the place near the end of the bonding wire 3 is surrounded by an inert gas atmosphere, the oxidization of a ball 8 is prevented and a uniform shapes is obtained. Inert gas is supplied from the bonding horn 1 at all times.
申请公布号 JPH0289331(A) 申请公布日期 1990.03.29
申请号 JP19880241353 申请日期 1988.09.27
申请人 MATSUSHITA ELECTRON CORP 发明人 UENISHIKUBO NARIYUKI
分类号 H01L21/60 主分类号 H01L21/60
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