| 摘要 |
PURPOSE:To provide 1.5 tesra or more high saturation magnetic flux density, excellent soft magnetic characteristics and high frequency characteristics by alternately laminating thin oxide films each nonmagnetic and containing Zn of high hardness, and thin magnetic films each having high saturation magnetic flux density. CONSTITUTION:Thin magnetic films 12 and thin oxide films 13 are alternately laminated many times on a board 11 to form a multilayer magnetic film 10. The film 12 is made of Fe, and the film 13 is made of ZnO. The film 10 is formed by alternately laminating the Fe and ZnO by using Fe and ZnO targets on a glass and polyimide board 11. The material of the magnetic film includes alloy which contains as a main ingredient an element selected from metal elements such as Fe, Co, Ni, etc., having high saturation magnetic flux density or metal element group. The material of the oxide film includes oxide containing zinc element. In order to reduce an overcurrent loss to improve high frequency characteristics, a material having small conductivity such as ZnO or NiZn ferrite is desirable. In order to improve soft magnetic characteristics, MnZn ferrite or NiZn ferrite is desirable. |
