| 摘要 |
PURPOSE:To prevent a shift to an arc discharge and to maintain a stable glow discharge by a method wherein, when an operation at a prescribed laser output at a constant pressure of a laser gas is shifted to a high-output operation, a laser gas pressure is adjusted to a value which is higher than a prescribed pressure. CONSTITUTION:The inside of a wind tunnel 20 of an oscillator 10 is evacuated; a laser gas is filled to about 1/30 atmospheric pressure; a glow discharge is generated uniformly over the whole range of an electrode in an electric discharge part 12; an ordinary operation is started. Since a laser output and a laser gas pressure are in a proportional relationship within a certain range, the laser gas pressure is increased to 1/20 to 1/15 atmospheric pressure when a full-output operation is started. Thereby, even when a zero-output operation and a large-output operation are repeated, a stable gas discharge can be secured. |
