MANUFACTURE OF SILICON NITRIDE THIN FILM,申请号JP19880210253-传众专利搜索

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发明名称	MANUFACTURE OF SILICON NITRIDE THIN FILM
摘要
申请公布号	JPH0258331(A)	申请公布日期	1990.02.27
申请号	JP19880210253	申请日期	1988.08.24
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	MIYAUCHI MICHIHIRO;KITAGAWA MASATOSHI;SETSUNE KENTARO;HIRAO TAKASHI
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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