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发明名称
MEASUREMENT OF POLISHED STATE OF DIELECTRIC ISOLATION SUBSTRATE
摘要
申请公布号
JPH0252448(A)
申请公布日期
1990.02.22
申请号
JP19880204427
申请日期
1988.08.16
申请人
OKI ELECTRIC IND CO LTD
发明人
ISHIKIRIYAMA MAMORU
分类号
G01N27/00;H01L21/66;H01L21/76;H01L21/762
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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