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发明名称
PRODUCTION OF THIN FILM
摘要
申请公布号
JPH01283373(A)
申请公布日期
1989.11.14
申请号
JP19880113111
申请日期
1988.05.10
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SUGITA RYUJI;TOMA KIYOKAZU;HONDA KAZUYOSHI
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
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