| 摘要 |
PURPOSE:To ensure faithful transfer of a pattern to a substrate, etc., by using novolak resin obtd. by condensing isopropenylphenol and other phenol deriv. with a carbonyl compd. as an alkali-soluble resin. CONSTITUTION:Novolak resin contg. structure units of isopropenylphenol which clears the profile of a pattern, increases the mol.wt. and improves the heat resistance is used as an alkali-soluble resin for a resist. The novolak resin further contains structural units of xylenol having high heat resistance and/or structural units of cresol which clears the profile of a pattern. Novolak resin obtd. by condensing m-isopropenylphenol, m-cresol and 3,5-xylenol with a carbonyl compd. can remarkably improve the characteristics of a resist because it has superior heat resistance and resolving power and can extremely clear the profile of a pattern. |
