| 发明名称 |
Method and apparatus for vapor drying |
| 摘要 |
An object to be dried is cooled and then held within an atmosphere of a drying medium vapor, until the temperature of the surface of the object rises to the temperature of the vapor.
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| 申请公布号 |
US4868996(A) |
申请公布日期 |
1989.09.26 |
| 申请号 |
US19880172310 |
申请日期 |
1988.03.23 |
| 申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
OHMORI, TOSHIAKI;HAMA, MASAHARU;FUKUMOTO, TAKAAKI |
| 分类号 |
F26B21/14;H01L21/00;H01L21/304;H01L21/306 |
主分类号 |
F26B21/14 |
| 代理机构 |
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代理人 |
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