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发明名称
OXYGEN ION BEAM PRODUCING DEVICE
摘要
申请公布号
JPH01241737(A)
申请公布日期
1989.09.26
申请号
JP19880067673
申请日期
1988.03.22
申请人
DENKI KAGAKU KOGYO KK
发明人
MORI YOSHIHARU;HAGIWARA HIROTOSHI;TAKAGI AKIRA;FUKUMOTO SADAYOSHI;UENO AKIRA;YAMADA SUZUYA;MUTSUKAWA AKIO
分类号
H01J27/20;H01J37/08
主分类号
H01J27/20
代理机构
代理人
主权项
地址
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