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发明名称
OPTICAL METHOD AND OPTICAL PROBE FOR MEASURING SHAPE OF SURFACE
摘要
申请公布号
JPH01233310(A)
申请公布日期
1989.09.19
申请号
JP19880061110
申请日期
1988.03.15
申请人
OLYMPUS OPTICAL CO LTD
发明人
KIYONO SATOSHI
分类号
G01B11/30
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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