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发明名称
Precision alignment device
摘要
申请公布号
US4867296(A)
申请公布日期
1989.09.19
申请号
US19870127444
申请日期
1987.12.02
申请人
MICRO COMPONENT TECHNOLOGY, INC.
发明人
VOLNA, WILLIAM M.
分类号
B65G47/88;B65G43/00;H01L21/68
主分类号
B65G47/88
代理机构
代理人
主权项
地址
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