发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To improve the integration of a circuit when an embedded wiring layer is used, by connecting a conductor region embedded in a groove to the second semiconductor region of a substrate surface. CONSTITUTION:The first semiconductor region 21 isolates conductor regions 22 embedded in grooves from a semiconductor substrate 20 by reverse directional characteristics of diodes and the second semiconductor region forms source and drain regions 23f and 23d of a MOSFET. The third semiconductor region 24 has an effect connecting electrically the first semiconductor region 21 to the second semicondoctor region and as a result, it connects electrically a source region 23f or a drain region 23d of the MOSFET to an embedded conductor region 23. In this way, the integration of a circuit in the case where an embedded wiring layer is used can be improved.
申请公布号 JPH01186677(A) 申请公布日期 1989.07.26
申请号 JP19880005808 申请日期 1988.01.14
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 YAMADA TOSHIRO
分类号 H01L29/41;H01L21/3205;H01L21/76;H01L23/52;H01L29/78 主分类号 H01L29/41
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