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发明名称
NITRIDING OF OXIDE
摘要
申请公布号
JPH01173623(A)
申请公布日期
1989.07.10
申请号
JP19870331422
申请日期
1987.12.26
申请人
FUJITSU LTD
发明人
SHIOTANI YOSHIMI;NAKAI SOICHIRO
分类号
H01L21/318
主分类号
H01L21/318
代理机构
代理人
主权项
地址
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