SPUTTERING METHOD,申请号JP19870322288-传众专利搜索

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发明名称	SPUTTERING METHOD
摘要
申请公布号	JPH01162764(A)	申请公布日期	1989.06.27
申请号	JP19870322288	申请日期	1987.12.19
申请人	FUJITSU LTD;FUJITSU VLSI LTD	发明人	SATO YASUHISA;YAMADA NAOKI
分类号	H01L21/203;C23C14/34	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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