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经营范围
发明名称
ION IMPLANTER
摘要
申请公布号
JPH01154435(A)
申请公布日期
1989.06.16
申请号
JP19870314727
申请日期
1987.12.10
申请人
FUJITSU LTD
发明人
ARIMA YASUO
分类号
H01J27/16;H01J37/08;H01L21/265
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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