PROCESS OF PHOTOETCHING OF SUPERFICIAL COATINGS BASED ON POLYMERIC MATERIALS,申请号EP19870109597-传众专利搜索

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发明名称	PROCESS OF PHOTOETCHING OF SUPERFICIAL COATINGS BASED ON POLYMERIC MATERIALS
摘要
申请公布号	EP0253237(A3)	申请公布日期	1989.05.31
申请号	EP19870109597	申请日期	1987.07.03
申请人	MONTEDISON S.P.A.	发明人	GARBASSI, FABIO, DR.-CHEM.;OCCHIELLO, ERNESTO, DR.-CHEM.;MALATESTA, VINCENZO, DR.-CHEM.
分类号	H01L21/027;G03F7/20;H05K3/00;(IPC1-7):G03F7/10	主分类号	H01L21/027
代理机构		代理人
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