摘要 |
PURPOSE:To make impedances of power-supply patterns almost zero and to inhibit the generation of unnecessary noise by a method wherein superconductors are used for the power-supply patterns. CONSTITUTION:A multilayer ceramic substrate main body 1 is provided with first, second and third power-supply layers 2, 3 and 4, wherein superconductors to be used as their internal layer patterns are used as their conductors. The signal conductors of the layers 2, 3 and 4 are connected to one another through a through via hole 5 for the signal conductors and a penetrating via hole 6 for the power supplies. The via hole 6 is connected with the power-supply patterns of the layers 2, 3 and 4. Thereby, the impedances of the power-supply patterns are made to be almost zero and the generation of unnecessary noise is inhibited. |