| 摘要 |
PURPOSE:To obtain the subject compsn. having excellent storage stability, heat resistance and development characteristics and being capable of forming a thick film, by compounding a photo-polymn. initiator in a polyimide precursor having a specified structural unit. CONSTITUTION:A polyamic acid of formula I (wherein R<1> is a divalent org. group and n is 1 or larger) is obtd. by dissolving a diamine (e.g., 4,4'- diaminodiphenyl ether) in a polar solvent (e.g., N,N-dimethylacetamide) and reacting p-terphenyl-3,4,3',4'-tetracarboxylic dianhydride therewith. Then, a polyimide precursor having a structural unit of formula IV (wherein R<2> is a group contg. C=C; X is O or NH group) is obtd. by reacting a compd. of formula II (wherein R<3-5> is each H or CH3; R<6> is a divalent hydrocarbon group; Y is an NCO group or a group of formula III) (e.g., isocyanatoethyl methacrylate) in the presence of a catalyst (e.g., N,N-dimethylbenzylamine). 100pts.wt. this precursor, 0.01-30pts.wt. photo-polymn. initiator (e.g., benzophenone) and, if necessary, a polymerizable unsatd. compd. (e.g., methyl acrylate) for improving sensitivity are compounded. |
