发明名称 |
Method of producing films using a peeling jig |
摘要 |
The invention concerns a method of producing protective films or the like used as protective covers for photomasks or reticles. To peel a thin film (6) off a substrate (5), a peeling jig (8) constituted by a flexible annular frame (2) with an adhesive (10) applied thereon is pressed against the thin film applied on the substrate; a portion of the peeling jig is grabbed after the peeling jig and the thin film are adhered together; and the peeling jig and the film are peeled off the substrate. Before adhering the peeled film onto a side end surface of a pericle frame (21), of the two edges of the pericle frame, at least the edge formed by an inside surface thereof and the side end surface thereof is chambered.
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申请公布号 |
US4828640(A) |
申请公布日期 |
1989.05.09 |
申请号 |
US19880197964 |
申请日期 |
1988.05.24 |
申请人 |
MITSUI PETROCHEMICAL INDUSTRIES, LTD. |
发明人 |
KAYA, TOSHIO;FUJIMOTO, MAKOTO;NAKAGAWA, HIROAKI |
分类号 |
G03F1/14;G03F1/64 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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