| 摘要 |
PURPOSE:To minimize oxygen ion defects, defects due to insufficient ions and to provide excellent crystallinity and quality of film by ion implanting superconducting ceramic formed by a firing method. CONSTITUTION:In a manufacture of superconducting ceramic represented by a chemical composition formula (Ba1-XAX)2(Y1-YBY)Cu3O7-Z, where A is at least one of Sr, Ca, Mg, Pb, K, Rb and Cs, B is at least one of Sc, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu, 0<=X<=0.5, 0<=Y<=1.0, 0<=Z<=1.0, the ceramic are fired to obtain a sintered material of a composition having Z valve of relatively large range. With the material as a target material a thin film is formed by sputtering. Further, oxygen ions and A ions are implanted by an ion implanting method thereby to obtain a superconducting ceramic thin film having the Z value of smaller composition than that of the sintered material. |
