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发明名称
ANNEALING METHOD FOR ION-IMPLANTED LAYER
摘要
申请公布号
JPH0193115(A)
申请公布日期
1989.04.12
申请号
JP19870251027
申请日期
1987.10.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TAMURA AKIYOSHI
分类号
H01L21/265;H01L21/324
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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