| 摘要 |
PURPOSE:To make it possible to maintain a fixed quantity of starting material fed at a constant flow rate of carrier gas by installing two chambers for holding starting material and by spatially connecting the chambers to each other so that the carrier gas which carries the starting material can be successively passed through the chambers. CONSTITUTION:First and second chambers 10, 20 for holding starting material 100 such as trimethyl indium are installed and spatially connected to each other so that carrier gas which carries the starting material can be successively passed through the chambers 10, 20. When the resulting vessel is used, a fixed quantity of starting material fed can be maintained at a constant flow rate of the carrier gas. |
