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发明名称
FOCAL POINT AUTOMATIC ADJUSTING DEVICE FOR BEAM
摘要
申请公布号
JPS6482444(A)
申请公布日期
1989.03.28
申请号
JP19870240463
申请日期
1987.09.24
申请人
JEOL LTD
发明人
IIDA NOBUO
分类号
H01J37/141;H01J37/21;H01L21/30
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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