| 摘要 |
PURPOSE:To ensure the detection of the slant angle of the side end surface of a pattern simply without destructing a sample, by moving an aperture part on an image forming lens, and detecting light which passes the aperture part lens and is reflected by the side end surface of the pattern. CONSTITUTION:An aperture part 2 is moved in the directions of arrows A. At this time, the detected light intensity in a photodetector 3 is changed with the change in the incident angle of incident light accompanying the movement of the aperture part. One peak, where the detected light intensity I shows the maximum value I0 at a moving position X0, is formed. Said peak is obtained when the intensity of the reflected light becomes the maximum value, i.e., the angle of the reflected light with respect to a side end surface E of a pattern P becomes 90 deg.. The moving position X of the aperture part 2 and the detected light intensity I of the photodetector 3 are sent to an operation part 4. A slant angle theta of the side end surface E is computed from the value of the moving position when the detected light in intensity I shows the maximum value in the operating part. |
