| 摘要 |
<p>PURPOSE:To satisfactorily transmit a laser light, even if an inclination of a reflecting mirror is fluctuated, by providing a condensing optical system for the laser light, and a relay optical system which has been placed between the reflecting mirrors so that a front side focus of an incident side lens becomes a position of an incident side reflecting mirror, and a rear side focus of an emitting side laser light becomes a position of an emitting side reflecting mirror. CONSTITUTION:By a lens 22, an emitting opening 20 of a laser light source 10 is allowed to form an image on a reflecting mirror 24. Subsequently, the image in this reflecting mirror 24 is brought to relay image formation onto a reflecting mirror 28 by a lens system 26, and also, the image in this reflecting mirror 28 is brought to relay image formation onto a reflecting mirror 32 by a lens system 30 and furthermore, the image in this reflecting mirror 32 is brought to relay image formation onto a reflecting mirror 36 by a lens system 34. In such a way, even if an inclination angle of plural reflecting mirrors for executing a light transmission of a long distance extending from the laser light source 10 to an exposing device 12 is fluctuated, the generation of such an inconvenience as vignetting, etc., is reduced.</p> |
