| 摘要 |
PURPOSE:To improve the degree of cleanliness in an air cleaner for use in manufacturing a semiconductor element or the like by a method wherein circulation air from an upper duct is sent to an air cleaned region through a super-high performance filter and an static eliminator and then the air is regulated through a flow regulator and a cooling coil. CONSTITUTION:A room temperature within an air cleaning region 26 is set by a room temperature adjuster 37 and then a blower 22 is operated. With this arrangement, circulation air from an upper duct 21 flows into a chamber 24, passes through a super-high performance filter 25 and flows into an air cleaning region 26, and static electricity is removed by a static eliminator 27. Clean air of which static electricity is removed flows in an element transporting box 29, passes through a flow regulator plate 30, a lower duct 31 and a cooling coil 33, its temperature is returned back to its set temperature and then the air is circulated. With this arrangement, it is possible to improve the degree of cleanliness. |
