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发明名称
POSITIONING MECHANISM
摘要
申请公布号
JPS6423170(A)
申请公布日期
1989.01.25
申请号
JP19870178736
申请日期
1987.07.17
申请人
TOKYO ELECTRON LTD
发明人
ITOYAMA TAKETOSHI
分类号
G01R31/00;G01R31/26;H01L21/66;H01L21/677;H01L21/68
主分类号
G01R31/00
代理机构
代理人
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地址
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