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发明名称
PLATING EQUIPMENT
摘要
申请公布号
JPS6415376(A)
申请公布日期
1989.01.19
申请号
JP19870168637
申请日期
1987.07.08
申请人
HITACHI LTD
发明人
MUTO TSUNEFUMI;ORITA SHINICHI
分类号
C23C18/16;C23C18/31;C23C18/40;H05K3/24;H05K3/42
主分类号
C23C18/16
代理机构
代理人
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地址
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