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发明名称
TURBOMOLEKULARPUMPE
摘要
申请公布号
DE3722164(A1)
申请公布日期
1989.01.12
申请号
DE19873722164
申请日期
1987.07.04
申请人
ARTHUR PFEIFFER VAKUUMTECHNIK WETZLAR GMBH
发明人
HOELSS,KURT;LOTZ,HEINRICH
分类号
F04D19/04;(IPC1-7):F04D19/04
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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