| 摘要 |
PURPOSE:To reduce the vibration of the coupling section of a pipe, to prevent a noise and to prevent the coupling section of the pipe from damaging due to the vibration and from removing from a laser gas pipe by coupling the coupling section of the pipe with rubber. CONSTITUTION:A pipe 7 for circulating laser gas is connected through the coupling sections 9a, 9b, 9c, 9d, 9e of rubber to pipes 8a, 8b, 8c, 8d, 8e, respectively. The sections 9a-9e are so provided as not to transmit the vibration of a Root's blower 5 and a cooler 6 and the like to discharge tubes 1a-1d. The rubber is preferably silicone rubber which has excellent corrosion resistance. The pipe 8a is formed in a pipe state at the end of its flange to have protrusions 11a, 11b for preventing the rubber 9a from removing and for holding its hermetical seal. Further, a tapered section 12 for improving the operability at the time of coupling the rubber 9a to the end is provided. A ring 13 presses the rubber 9a to the pipe 8a, secures the rubber 9a to the pipe 9a, and holds its hermetical seal. |
