发明名称 LIQUID METAL ION SOURCE
摘要 PURPOSE:To prevent damage of a needle tip with straightness of a needle to a reserver retained by forming the needle tip after the needle and a cap are integrally formed. CONSTITUTION:A needle 1 is integrally formed with a cap 10 so that the needle 1 tip does not tilt to a reserver 2 and a supporting rod 5. By the way, the cap 10 united with the needle 1 is tungsten, tantalun, carbide, or nitride etc. Consequently, the tip part of the needle 1 can be formed straightly to the cap 10 because the tip forming of the needle 1 can be made with the cap 10 as a basis. This enables damage of the needle tip to be prevented.
申请公布号 JPS63299039(A) 申请公布日期 1988.12.06
申请号 JP19870133886 申请日期 1987.05.29
申请人 SEIKO INSTR & ELECTRONICS LTD 发明人 ISHII TAKICHI
分类号 H01J37/08;H01J37/26 主分类号 H01J37/08
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