| 摘要 |
PURPOSE:To surely prevent a foreign substance from adhering to an object to be processed by a method wherein a hood is installed at a circumference of a tubular body connected to the source of the air in such a way that it covers object to be processed and a tube route to feed a gas from the upper part to the lower part is opened inside this hood. CONSTITUTION:A hood 11 is installed at a circumference of a tubular body 1 to feed a gas to a semiconductor component 3 as an object to be processed in such a way that it covers the semiconductor component 3. A branch tube 13 which feeds the gas from the upper part to the lower part is opened inside this hood 11. By this setup, it is possible to prevent a dust from entering the inside of the hood 11. Accordingly, it is possible to form a dust-free atmosphere in the circumference of the semiconductor component 3; it is possible to prevent a floating dust outside the hood 11 from being introduced or the dust on the semiconductor component 3 from being whirled up when the gas is being fed. As a result, it is possible to surely prevent a foreign substance from adhering to the semiconductor component being the object to be processed.
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