Pump pressure sensor

摘要

A back pressure sensor for a positive displacement pump comprises at least one flexible beam having a pivot end and a drive connector end, and a pump actuator mounted between the pivot end and the drive connector end. The pump actuator connects with a positive displacement member of a pump. At least one sensor beam is connected to the flexible beam at a mounting position between the distal end and vibration damping end thereof. A first capacitor plate is mounted on the flexible beam at a position adjacent to the pivot end thereof, and a second capacitor plate is mounted adjacent the distal end of the sensor beam in a position facing the first capacitor plate at a distance which permits a capacitance coupling between the capacitor plates. A vibration damping mass is secured to the vibration damping end of the sensor beam for damping drive motion vibrations in the sensor beam.