| 摘要 |
PURPOSE:To uniformize the distribution of thin iron nitride films to be formed by using at least two ion guns for projection of ion beams and projecting the same place of a nonmagnetic base. CONSTITUTION:The same place of the nonmagnetic base 3 is irradiated by using at least two ion guns 6a, 6b for projection of the ion beams in a process for production of a magnetic recording medium to produce the magnetic recording medium having the magnetic layer consisting of the thin iron nitride films by execution of vapor deposition while projecting the ion beams onto the nonmagnetic base. The nitrogen ions to be irradiated differ in the incoming directions and, therefore, the irradiation doses of the nitrogen ions are uniformed if the same place on the nonmagnetic base is irradiated by >=2 ion guns in such a manner. The distribution thin iron nitride films is thus uniformized and since the range where said films are filmed are widened, this method is applicable to nonmagnetic bases of broad width.
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