| 摘要 |
PURPOSE:To insulate between functional elements of superconducting ceramics on the same substrate by injecting a metal element to the superconducting material or its starting material formed on the substrate, and then heat treating it in an oxidative atmosphere to oxidize the element, thereby insulating it. CONSTITUTION:An oxide superconducting material 2 is formed on a substrate 1, the upper surface is selectively coated with a photoresist 3, and aluminum is, for example implanted by an ion implanting method 4 to regions 5, 5' not formed with the resist 3. Then, when the whole is again heated and baked in an oxidative atmosphere, the resist 3 is removed, an ion implanted isolation region 11 continuously holds insulative even in later high temperature treating steps, and a superconducting region 10 also holds a superconducting state. Thus, the side periphery of the material is added to the superconducting material to add the metal oxide thereto, thereby insulating it.
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