| 摘要 |
PURPOSE:To make the temperature dependency of a resonance frequency nearly linear by high-frequency-sputtering a piezo-electric body, the principal component of which is Pb(Zr,Ti) O3, on a metallic thin diaphragm, on which the film of SiO2 or TiO2 is formed beforehand. CONSTITUTION:A density sensor is constituted by installing the diaphragm 1 and a piezo-electric element 2, at the housing 3 of the open end of a horn 4. The diaphragm 1 is a metallic diaphragm having the film of SiO2 or TiO2 on its surface, and the piezo-electric element 2 is formed by giving a high frequency sputtering to the said diaphragm 1 as the piezo-electric body, composed of mainly Pb(Zr, Ti) O3, is made to be a target. |
