| 摘要 |
PURPOSE:To obtain a uniform epitaxial crystal, by interposing a spacer between a substrate and a substrate installation block and between the substrate and a disc-shaped member so that point contact states are made respectively therebetween. CONSTITUTION:A spherical spacer 37, which is formed by linking spherical blocks together with a thin plate 36, is interposed between a substrate 38 and a substrate installation block 31 and between the substrate 38 and a disc-shaped member 34, so that point contact states are made by this spherical spacer 37 between the substrate 38 and the substrate installation block 31 and between the substrate 38 and the disc-shaped member 34, and heat coming from the substrate installation block 31 is prevented from being transferred to the substrate 38. Hence, a uniform distribution of temperature is obtained on the surface of the substrate, and an epitaxial crystal which is uniform in its thickness and its composition can be formed on the substrate.
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