PRODUCTION OF MAGNETIC RECORDING MEDIUM

摘要

PURPOSE:To obtain the titled medium having high S/N by forming a thin Co- base alloy film having perpendicular magnetic anisotropy by a vacuum deposition method on a traveling substrate at a film deposition speed of >=800Angstrom /sec in an atmosphere contg. gaseous H2 at the ratio higher than the ratio of other gases. CONSTITUTION:The substrate 1 travels in an arrow A direction along a cylindri cal can 2. a shielding plate 5 is disposed between an evaporation source 6 and a can 2. Evaporating atoms 7 adhere to the substrate 1 through a slit S. the adhesion of the atoms 7 to the substrate 1 begins in an initial part B of film formation and ends in a terminal part C of the film formation. The gaseous hydrogen is introduced through a gaseous hydrogen introducing pipe 8 into a vacuum vessel and is blown out of a hole 9. The substrate 1 from a supply roll 3 is taken up on a take-up roll 4 and the atoms 7 are deposited thereon by evaporation, by which the film is formed at the film deposition speed of >=800Angstrom /s. The thin film type magnetic recording medium for perpendicular recording having high S/N in a short wavelength region is thereby obtd. even if the substrate 1 such as polyethylene terephthalate film having poor heat resistance is used.