| 摘要 |
<p>PURPOSE:To improve the heat resistance, the reliability, and the patterning precision of a filter by forming a leveling layer, an intermediate layer, and a protective layer with thermosetting high polymer materials. CONSTITUTION:A bonding pad 3, a scribing line 4, a foundation layer 5, an intermediate layer 6, a protective layer 7, first and second color filters 8 and 9, and a silicon substrate 10 are provided. In this case, the leveling layer 5, the intermediate layer 6, and the protective layer 7 are formed with thermosetting high polymer materials where a thermal reaction initiator, a thermal crosslinking agent, or the like is added to or a thermally reactive monomer, or the like is copolymerized to essential components of transparent material having a heavy molecular weight as transparent high polymer materials. Transparent high polymer material which can be thermally hardened sufficiently at a temperature which does not degrade the filter are used as thermosetting high polymer materials. Thus, the heat resistance and the reliability are improved and the degree of leveling is improved by the fluidity of high polymer materials at the time of thermal hardening to improve the patterning precision of the filter.</p> |
