| 摘要 |
PURPOSE:To maintain the sufficient gas sealing property by filling at least one of surface oxidized silicone carbide and silicone nitride particles into holes made of a porous member and closing the holes when reacting the surface oxide of particles with hot-phosphoric acid and obtaining a phosphate compound. CONSTITUTION:Particles of surface oxidized silicone carbide 23, for example, are filled into holes 22 on the peripheral section made of a porous member 21 constituting a cell. The said holes 22 are closed by the volume expansion action when the said particles of the surface oxide is reacted with hot- phosphoric acid and a phosphate compound is obtained. Thereby, the minute gas sealing not caused by a capillary function of phosphoric acid can be obtained, and the sufficient gas sealing property can be invariably maintained without being affected by the quantity of phosphoric acid. |
