| 摘要 |
PURPOSE:To eliminate the clouding of the inner wall of a transparent vinyl chloride pipe, by constituting the title supply pipe of the chemical liquid supply inside pipe to a chemical liquid treatment apparatus,the outside pipe enclosing said inside pipe and an inflow pipe for allowing a liquid or gas to flow in the outside pipe. CONSTITUTION:Water is allowed to always slowly flow in an outside pipe 71 from an inflow pipe 8 or water is usually stagnated and allowed to flow only at the time of the checking of leakage. The water discharged from a discharge pipe 9 is examined for change in the resistance thereof by a specific resistance measuring device or examined for change in the pH thereof by a pH meter to check the presence of leakage of a chemical liquid. As the liquid flowing to the outside pipe 71, other liquid other than water may be used and gas such as air other than the liquid may be used. Based on the constitution of this chemical liquid supply pipe, by allowing the chemical liquid supplied to the inside pipe of the chemical liquid supply pipe to flow and allowing the liquid or gas to flow to the outside pipe enclosing the inside pipe, the clouding of the outside pipe due to the stagnation of chemical liquid mist is eliminated. |
