| 摘要 |
PURPOSE:To improve the maintainability of a laser oscillator by measuring one point temperature in a holder substrate for holding a resonator reflecting mirror by a temperature detector to monitor the absorptivity of the mirror, and informing the operator of it when the absorptivity becomes larger than a set value. CONSTITUTION:When the absorptivity of a partial reflecting mirror 5 is assumed to be increased due to the adherence of a contaminant, the temperature of the mirror 5 rises, and the temperature difference of the two points measured by temperature detectors 17, 18 in a holder substrate 11a increases. When thermocouples are used as the detectors 17, 18, the temperature difference of the two points is obtained as the difference of the output voltages. Thus, the comparator of a comparison alarm device 15 transmits a signal to the alarm unit of the device 15 when the voltage difference becomes larger than a set voltage, thereby notifying a user of it. Thus, it can prevent the curvature of the mirror from varying and a lens from being heated to obtain a stable laser beam output and stable workability. |
